Development of three-dimensional microanalysis using ion and electron dual-focused beams.
نویسندگان
چکیده
منابع مشابه
Three-dimensional micromachining of silicon using focused high-energy ion beams
There are many techniques available for two-dimensional machining and patterning of semiconductor surfaces for optoelectronic and microelectronic applications. These mainly use photolithography, electron beam or X-ray lithography or reactive ion etching. Smooth surfaces and high-aspect ratio sidewalls can be produced, but they are all limited to creating a single etch depth per processing stage...
متن کاملThree-Dimensional Analysis of Peeled Internal Limiting Membrane Using Focused Ion Beam/Scanning Electron Microscopy
Purpose To reevaluate the effect of internal limiting membrane peeling during vitrectomy on the Müller cell damage, we examined the ultrastructure of the internal limiting membrane by using focused ion beam/scanning electron microscopy (FIB/SEM). Methods A total of 12 internal limiting membranes obtained during surgery in both the macular hole and the idiopathic epiretinal membrane groups wer...
متن کاملDual focused coherent beams for three-dimensional optical trapping and continuous rotation of metallic nanostructures
Metallic nanoparticles and nanowires are extremely important for nanoscience and nanotechnology. Techniques to optically trap and rotate metallic nanostructures can enable their potential applications. However, because of the destabilizing effects of optical radiation pressure, the optical trapping of large metallic particles in three dimensions is challenging. Additionally, the photothermal is...
متن کاملHigh-resolution three-dimensional reconstruction: A combined scanning electron microscope and focused ion-beam approach
The ability to obtain three-dimensional information has always been important to gain insight and understanding into material systems. Three-dimensional reconstruction often reveals information about the morphology and composition of a system that can otherwise be obscured or misinterpreted by two-dimensional images. In this article, we describe tomographic measurements with 10 nm scale resolut...
متن کاملIntense Electron and Ion Beams
Material characteristics versus the number of electrons in the valence atom shell not used in the previously published papers are presented here. The electric field interaction with the collective electrons and the ion skeletons of the electrode material result in the initiation of the plasma formation (ecton) on the surface of one of the electrodes and the breakdown of the interelectrode gap. ...
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ژورنال
عنوان ژورنال: BUNSEKI KAGAKU
سال: 1998
ISSN: 0525-1931
DOI: 10.2116/bunsekikagaku.47.313